RESUMO
Structural hierarchy is found in myriad biological systems and has improved man-made structures ranging from the Eiffel tower to optical cavities. In mechanical resonators whose rigidity is provided by static tension, structural hierarchy can reduce the dissipation of the fundamental mode to ultralow levels due to an unconventional form of soft clamping. Here, we apply hierarchical design to silicon nitride nanomechanical resonators and realize binary tree-shaped resonators with room temperature quality factors as high as 7.8 × 108 at 107 kHz frequency (1.1 × 109 at T = 6 K). The resonators' thermal-noise-limited force sensitivities reach 740 zN/Hz1/2 at room temperature and 90 zN/Hz1/2 at 6 K, surpassing state-of-the-art cantilevers currently used for force microscopy. Moreover, we demonstrate hierarchically structured, ultralow dissipation membranes suitable for interferometric position measurements in Fabry-Pérot cavities. Hierarchical nanomechanical resonators open new avenues in force sensing, signal transduction and quantum optomechanics, where low dissipation is paramount and operation with the fundamental mode is often advantageous.
RESUMO
Extreme stresses can be produced in nanoscale structures; this feature has been used to realize enhanced materials properties, such as the high mobility of silicon in modern transistors. We show how nanoscale stress can be used to realize exceptionally low mechanical dissipation when combined with "soft-clamping"-a form of phononic engineering. Specifically, using a nonuniform phononic crystal pattern, we colocalize the strain and flexural motion of a free-standing silicon nitride nanobeam. Ringdown measurements at room temperature reveal string-like vibrational modes with quality (Q) factors as high as 800 million and Q × frequency exceeding 1015 hertz. These results illustrate a promising route for engineering ultracoherent nanomechanical devices.
